Ultra-clean Perfluoroelastomer Door Seal with Superior Plasma Resistance and High-Temperature Resistance up to 300°C for Semiconductor Applications
Product Details
Ultra-clean perfluoroelastomer Door Seal
,Superior plasma resistance Door Seal
,High-temperature resistance Door Seal
Ultra-clean perfluoroelastomer engineered for harsh plasma and highly corrosive gas process conditions. This material delivers superior performance in metal content, outgassing rate, and permeability, with 76% less loss than original equipment manufacturer specifications. Features exceptional plasma resistance, corrosion resistance, and high-temperature performance with adhesion strength exceeding 3MPa.
- Ultra-clean with low exudates
- Superior oxygen and fluorine plasma resistance
- Low particle content
- Low outgassing rate
- Excellent sealing performance
- Colloidal seals
- Gas pipeline seals
- Flange seals
- Metal door panel seals
- Deposition process
- Dry etching
- Wet etching
- Oxidation/diffusion
- Removal process
| Property | Material Benchmarking | Self-Developed Materials |
|---|---|---|
| Color | Amber | Amber translucent |
| Material composition (F%) | 85 | 85 |
| Hardness | 76 | 74 |
| Material grade | FFKM | FFKM |
| 100% constant elongation | 3.5 | 4.76 |
| Tensile strength (MPa) | 12 | 13.78 |
| Elongation at break | 210% | 233% |
| Proportion | 2.06 | / |
| Compressed permanent deformation (70 hours 204°C) | 19% | 18% |
| Actual temperature resistance | -10°C to 280°C | / |
| Maximum temperature | 300°C | 300°C |
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