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"ultra clean perfluoroelastomer door seal"
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Ultra-clean Perfluoroelastomer Door Seal with Superior Plasma Resistance and High-Temperature Resistance up to 300°C for Semiconductor Applications
Ultra-clean perfluoroelastomer seals with superior plasma/corrosion resistance, 76% less loss than OEM. Low particle content, excellent sealing for semiconductor processes. FFKM material withstands 300°C.
