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"ultra clean perfluoroelastomer door seal"
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Ultra-clean Perfluoroelastomer Door Seal with Superior Plasma Resistance and High-Temperature Resistance up to 300°C for Semiconductor Applications
Perfluoroether Knife Door Seals and Flat Door Seals for Semiconductor Chip Heat Sinks Perfluoroelastomer Flat Door Seal & Knife Door Seal Material Introduction Ultra-clean perfluoroelastomer engineered for harsh plasma and highly corrosive gas process conditions. This material delivers superior performance in metal content, outgassing rate, and permeability, with 76% less loss than original equipment manufacturer specifications. Features exceptional plasma resistance,
